JPH0115986B2 - - Google Patents
Info
- Publication number
- JPH0115986B2 JPH0115986B2 JP57192313A JP19231382A JPH0115986B2 JP H0115986 B2 JPH0115986 B2 JP H0115986B2 JP 57192313 A JP57192313 A JP 57192313A JP 19231382 A JP19231382 A JP 19231382A JP H0115986 B2 JPH0115986 B2 JP H0115986B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- cover
- mass spectrometer
- ion
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 claims description 56
- 238000010884 ion-beam technique Methods 0.000 claims description 10
- 239000011148 porous material Substances 0.000 claims description 10
- 238000000605 extraction Methods 0.000 claims description 6
- 230000007935 neutral effect Effects 0.000 description 12
- 239000002245 particle Substances 0.000 description 12
- 238000004458 analytical method Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57192313A JPS5981854A (ja) | 1982-10-31 | 1982-10-31 | 二次イオン質量分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57192313A JPS5981854A (ja) | 1982-10-31 | 1982-10-31 | 二次イオン質量分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5981854A JPS5981854A (ja) | 1984-05-11 |
| JPH0115986B2 true JPH0115986B2 (en]) | 1989-03-22 |
Family
ID=16289196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57192313A Granted JPS5981854A (ja) | 1982-10-31 | 1982-10-31 | 二次イオン質量分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5981854A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2640935B2 (ja) * | 1983-12-23 | 1997-08-13 | エス・ア−ル・アイ・インタ−ナシヨナル | 表面の検査方法および装置 |
| JPH03184251A (ja) * | 1989-12-12 | 1991-08-12 | Shimadzu Corp | 試料表面分析装置 |
-
1982
- 1982-10-31 JP JP57192313A patent/JPS5981854A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5981854A (ja) | 1984-05-11 |
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